Method for manufacturing liquid crystal display devices and devices manufactured thereby

ABSTRACT

A liquid crystal display device includes a substrate, a liquid crystal layer, a liquid crystal alignment layer between the substrate and the liquid crystal layer, and a barrier layer between the liquid crystal alignment layer and the liquid crystal layer. A second substrate also includes a liquid crystal alignment layer an a barrier layer formed over the liquid crystal alignment layer. In a particular embodiment, the substrate is a reflective display backplane, and the second substrate is a transparent substrate having a transparent electrode layer. The barrier layers protect the liquid crystal alignment layers from contamination due to the adsorption and/or absorption of impurities. In an example embodiment, the barrier layer is formed using a silane or a silizane reagent. Optionally, the surface of the liquid crystal alignment layer is plasma cleaned prior to or instead of forming the barrier layer.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates generally to liquid crystal display (LCD) devices, and more particularly to a method of manufacturing LCD devices. Even more particularly the present invention relates to manufacturing processes and the LCD display devices manufactured thereby that decrease the incidence of defects arising over time, including the catastrophic failure of liquid crystal on silicon (LCOS) light valves.

2. Description of the Background Art

Reflective and transmissive liquid crystal display (LCD) devices are used in video projectors, rear projection televisions, computer displays, and so on as a means for producing high quality imagery. Known LCD devices have decreased the size, weight, and overall cost of many electronic products, while at the same time increased the quality of imagery produced when compared to conventional alternatives such as cathode ray tubes (CRT).

FIG. 1 shows one known type of LCD display device, the reflective liquid crystal on silicon (LCoS) light valve 100. Display device 100 is formed on a silicon substrate 102, and includes an integrated circuitry 104, insulating layer 106, a plurality of pixel mirrors 108, a planarized layer 110, a protective coating 112, a lower liquid crystal alignment layer 114, a liquid crystal layer 116, an upper liquid crystal alignment layer 118, transparent electrode layer 120, a transparent (e.g., glass) substrate 122, and an anti-reflective coating 124. The thicknesses of the layers depicted in FIG. 1 are not shown to scale, but are instead exaggerated so as to be more clearly visible.

Mirrors 108 are coupled to circuitry layer 104 through a plurality of vias formed in insulating layer 106. Planar layer 110 and protective layer 112 provide a flat, relatively robust surface for subsequent layers of the device. The thickness of planar layer 110 and protective layer 112 over mirrors 108 are on the order of optical thin film coatings. Alignment layers 114 and 118 help to properly align the liquid crystals of layer 116. Transparent electrode 120 (e.g., Indium Tin Oxide) is formed on the bottom surface of glass substrate 122, and antireflective coating 124 is formed on the top surface. Alignment layer 118 is formed on transparent electrode 120.

During operation, light passes through all upper layers 124, 122, 120, 118, 116, 114, 112, and 110 of device 100 to impinge on pixel mirrors 108, is reflected from the top surfaces of mirrors 108, and then exits the device again passing through upper layers 110, 112, 114, 116, 118, 120, 122, and 124. The polarization of the light is altered by liquid crystal layer 116, depending on the electrical field across liquid crystal layer 116. When transparent electrode 120 is held at a particular voltage, the electrical field across liquid crystal layer 116 is controlled by the voltages asserted on pixel mirrors 108 by circuitry layer 104. Thus, the polarization of spatially pixilated portions of the incident light can be individually modulated.

Alignment layers 114 and 118 provide a means of aligning the nematic liquid crystals of liquid crystal layer 116. This alignment is accomplished by inducing a topographical asymmetry in the surface. The surface asymmetry causes the liquid crystal molecules to be pinned at the surface. Consequently the bulk orientation of the LC is controlled by the surface orientation.

One known method for forming alignment layers includes forming a polyimide layer and then mechanically rubbing the polyimide layer in a predetermined direction to create the surface asymmetry. One common limitation of polyimide alignment layers is that they are not very stable under high intensity illumination.

To address the limitations of polyimide alignment layers, evaporated thin film alignment layers were developed. These evaporated thin film layers are typically formed from oblique evaporation of silicon oxide (SiO) or silica (SiO₂). The evaporated thin film layers have been found to create very stable alignments under high intensity illumination. This is very important for consumer TV applications and so it is the preferred method of alignment for LCOS displays.

A problem has arisen, however, with devices incorporating evaporated thin film alignment layers. In particular, the pretilt angle is observed to change over time, thereby changing the performance of the display. This change affects both the contrast and color of the projected image and so is deemed unacceptable for consumer applications. The gradual failure of LCD devices appearing over time can be particularly costly and bothersome to manufacturers, because when defects in LCD devices only become apparent after the passage of some time, the devices will most likely have been incorporated into other products. Then, failure of the device can result in diminished optical performance of the product, costly warranty repairs, and/or costly product recalls.

What is needed, therefore, is a method of manufacturing an LCD device that is less likely to have initial image defects and less prone to future failure. What is also needed is a method for forming an alignment layer in an LCD device that does not adversely affect device yield or useful life. What is also needed is an LCD device that is less prone to future failure than known devices.

SUMMARY

The inventors have found that the catastrophic failure of many LCD display devices arising over time is much more prevalent when environmental stress factors such as heat and humidity are present. Further investigation lead to the discovery of trace impurities inside the liquid crystal layer. The inventors realized that trace impurities (e.g., water vapor) were being absorbed into or adsorbed onto the thin film liquid crystal alignment layers. The absorption and/or adsorption of impurities interferes with the function of the alignment layers and causes perceptible image defects. In some cases, non-uniform layers of impurity deposits form on the liquid crystal alignment layers. The non-uniform impurity deposit layers consequently result in a skewing of the alignment of the liquid crystals within the liquid crystal layer, resulting in perceptible image defects and/or catastrophic failure of the device.

The present invention overcomes the problems associated with the prior art by providing an LCD device with a barrier layer between the obliquely evaporated liquid crystal alignment layer and the liquid crystal layer. In a disclosed embodiment, the LCD device includes a substrate, a liquid crystal layer, a liquid crystal alignment layer between the substrate and the liquid crystal layer, and a barrier layer between the liquid crystal alignment layer and the liquid crystal layer.

The substrate can be either a reflective substrate or a transmissive substrate. For example, in one embodiment, the substrate is a reflective display backplane formed on a silicon substrate and including a circuitry layer and a plurality of reflective pixel mirrors. The barrier layer can also be formed on transparent substrates including, but not limited to, the transparent electrode of a reflective LCD and the transparent electrodes of transmissive LCDs. Thus, it is expected, but not essential, that devices will generally include two barrier layers, one on a substrate on one side of the liquid crystal layer and one on the substrate on the opposite side of the liquid crystal layer.

The barrier layer protects the liquid crystal alignment layer without interfering with its function. The barrier layer is more resistant to at least one of the adsorption or absorption of impurities than the liquid crystal alignment layer. Therefore, it protects the alignment layer by reducing the instances of absorption and adsorption of trace impurities (e.g., water, etc.) into/onto the liquid crystal alignment layer. The barrier layer is sufficiently thin that it also communicates the anisotropic properties of the liquid crystal alignment layer to the liquid crystal layer, and so does not interfere with its function. For example, in a disclosed embodiment, the barrier layer is a monolayer formed directly on the liquid crystal alignment layer and is in direct contact with the liquid crystal layer. In addition to protecting the liquid crystal alignment layers from contamination by impurities, the barrier layers also enhance adhesion with the liquid crystal cell gasket, which is disposed around the perimeter of the liquid crystal layer to retain the liquid crystal layer between the substrates.

The particular composition of the barrier layer will depend upon the composition of the liquid crystal alignment layer and vice versa. In the example embodiments disclosed, the alignment layer is a thin film oxide layer formed from either SiO or SiO₂. The barrier layer is a hydrophobic layer formed with one of a silane (e.g., Octyl-Triethoxy-Silane) or a silizane (e.g., Hexamethyldisilizane). Additionally, the reagent can be functionalized with chemical moieties, for example by adding chemical moieties such as NH₂, OH, COOH, etc. to a triethoxy class silane such as Octyl-Triethoxy-Silane. The modification of the reagent facilitates tailoring characteristics of the barrier layer including, but not limited to, liquid crystal surface interaction, moisture adsorption, glue adhesion, and so on.

A method of manufacturing a liquid crystal display device is also disclosed. The method includes providing a substrate, forming a liquid crystal alignment layer over the substrate, forming a barrier layer over the liquid crystal alignment layer, and forming a liquid crystal layer over said barrier layer. In a particular method, two substrates are provided, one substrate being a reflective display backplane and the other being a transparent substrate suitable for use as a transparent electrode. A separate liquid crystal alignment layer is formed over each substrate, and a separate barrier layer is formed over each liquid crystal alignment layer. Then, the liquid crystal layer is formed on the barrier layer of one of the substrates, and the other of the substrates is mounted such that the barrier layers of the respective substrates face one another with the liquid crystal layer disposed there between.

In a particular method, the barrier layer is formed directly on the liquid crystal alignment layer, and the liquid crystal layer is in direct contact with the barrier layer. The step of forming the liquid crystal alignment layer includes, for example, forming a thin film oxide layer of SiO or SiO2. The film is typically applied at an oblique angle.

The step of forming the barrier layer includes forming a layer that is capable of communicating the anisotropic properties of the liquid crystal alignment layer to the liquid crystal layer, and that is more resistant to at least one of the adsorption or absorption of impurities than the liquid crystal alignment layer. For example, in one particular method, the liquid crystal alignment layer is an oxide layer and the barrier layer is a hydrophobic chemical that is applied using vapor prime process. As another example, the step of forming the barrier layer includes forming a monolayer on said liquid crystal layer with a silane (e.g., Octy-Triethoxy-Silane) or a silizane (e.g., Hexamethyldisilizane).

Optionally, the liquid crystal alignment layer is plasma cleaned prior to forming the barrier layer. The inventors have found that the step of plasma cleaning reduces the instances of device failure and increases the functional life of an LCD device. Indeed, these benefits are provided in varying degrees even without the addition of a barrier layer.

The benefits of the present invention are provided, at least in part, because the barrier layer and/or the plasma cleaning process provide a means for protecting the liquid crystal alignment layer from at least one of the absorption and adsorption of contaminants. The present invention facilitates an increase in the reliability of the devices by reducing the instances of contamination by absorption and/or adsorption of trace impurities during the manufacturing process. The present invention further enhances LCD device reliability, performance, and useful life time, by continuing to prevent contamination of the liquid crystal alignment layers by absorption and/or adsorption of impurities during the useful life of the device.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is described with reference to the following drawings, wherein like reference numbers denote substantially similar elements:

FIG. 1 is a cross-sectional view of a prior art liquid crystal display (LCD) device;

FIG. 2 is a cross-sectional view of a defective LCD device due to impurity layers formed on liquid crystal alignment layers of the device;

FIG. 3A is a cross-sectional view of a reflective display backplane with a barrier layer formed over the liquid crystal alignment layer;

FIG. 3B is an inverted cross-sectional view of a transparent substrate supporting a transparent electrode and a barrier layer formed over a liquid crystal alignment layer;

FIG. 3C is a cross-sectional view of an assembled LCD device formed by combining the substrates shown in FIG. 3A and FIG. 3B;

FIG. 4 is a flow chart summarizing one method of manufacturing a liquid crystal display device according to the present invention;

FIG. 5 is a flow chart summarizing one method of forming a barrier layer over a liquid crystal alignment layer as shown in FIG. 4; and

FIG. 6 is a flow chart summarizing one method of assembling an LCD device from two substrates according to the present invention.

DETAILED DESCRIPTION

The present invention overcomes the problems associated with the prior art, by providing a means for protecting the liquid crystal alignment layers of a liquid crystal display (LCD) device against contamination that interferes with the communication of the anisotropic properties of the liquid crystal alignment layers to the liquid crystal layer of the device In the following description, numerous specific details are set forth (e.g., particular methods of forming a barrier layer, particular display type, particular reagents used to form barrier layers, etc.) in order to provide a thorough understanding of the invention. Those skilled in the art will recognize, however, that the invention may be practiced apart from these specific details. In other instances, details of well known LCD display manufacturing practices (e.g., substrate manufacturing, liquid crystal types, liquid crystal cell assembly, electrical connections, etc) and components have been omitted, so as not to unnecessarily obscure the present invention.

FIG. 2 is a cross-sectional view of a reflective LCD device 200, which is formed on a silicon substrate 202 and includes a circuitry layer 204, an insulating layer 206, a plurality of pixel mirrors 208, a planarizing layer 210, a protective cap layer 212, a liquid crystal alignment layer 214, a liquid crystal layer 216, a second liquid crystal alignment layer 218, a transparent electrode 220, a glass substrate 222, and an antireflective coating 224. The relative thicknesses of the various layers are not shown to scale in FIG. 2. Instead, the thicknesses of the layers are exaggerated in order to provide a qualitative understanding of the location of the various layers.

The structure and function of the component layers of device 200 are substantially the same as the like component layers of device 100 of FIG. 1. However, FIG. 2 further shows layers of contaminants 226 formed on the liquid crystal alignment layers 214 and 218, which the inventors have determined to be the cause of the unusually high failure rate of certain LCD devices. In particular, contaminants (e.g., water) adsorb onto or absorb into liquid crystal alignment layers 214 and 218 and interfere with the communication of the anisotropic properties of liquid crystal alignment layers 214 and 218 to liquid crystal layer 216. As a result, the liquid crystals of layer 216 do not properly align and, therefore, do not respond uniformly to the application of an electrical field, which causes visibly perceptible defects (e.g., visible domain lines) in images generated by the device.

Impurity layers 226 are shown representationally in FIG. 2. Layers 226 are not intended to show any particular structure or thickness of the adsorbed/absorbed impurities. Rather, impurity layers 226 are merely intended to illustrate that contaminants can interfere with the function of liquid crystal alignment layers 214 and 218. Of course, the particular morphology of contamination deposits will depend on the particular contaminant, the composition of liquid crystal alignment layers 214, 218, and the source of the contamination, etc.

FIG. 3A is a cross-sectional view of a reflective display backplane 300 formed on a silicon substrate 302 and including an integrated circuitry 304, an insulating support layer 306, a plurality of pixel mirrors 308, a planarized layer 310, and a protective cap layer 312. These layers are those typically present when a reflective display backplane is received from a manufacturer. Additionally, device 300 includes a lower liquid crystal alignment layer 31 that is formed over cap layer 312 and a barrier layer 315 formed over lower liquid crystal alignment layer 314. Except for barrier layer 315, reflective display backplane 300 is substantially similar to known reflective display backplanes. Barrier layer 315 protects liquid crystal alignment layer 314 from contamination and is also capable of communicating the anisotropic properties of liquid crystal alignment layer 314 to an overlying liquid crystal layer 316 (FIG. 3C).

The composition of barrier layer 315 depends on various factors including, but not limited to, the composition of liquid crystal alignment layer 314, the type of liquid crystal material intended to be used, the type of contaminants to which the device may be exposed, and so on. In the particular embodiment described herein, liquid crystal alignment layer 314 is a thermally evaporated thin oxide film such as SiO₂ or SiO, which may be susceptible to contamination by water vapor. Barrier layer 315 is a hydrophobic monolayer that protects liquid crystal alignment layer 314 against the adsorption and/or absorption of contaminants including water.

Barrier layer 315 can be formed with a silizane (e.g., Hexamethyldisilizane) or a silane (Octyl-Triethoxy-Silane) reagent. However, it is expected that a silane will provide a benefit over a silizane, because a silane is capable of forming three bonds instead of one and is generally more reactive to the surface of the oxide layer. Further, silanes can be deposited by vapor or liquid deposition, but the inventors have found that vapor deposition provides better coverage and stability.

The structure of a silane is generally understood to include a silicon atom having a carbon chain and three other groups (e.g., ethoxy groups) bonded thereto. During the formation of barrier layer 315, the bonds between the silicon and the ethoxy groups are broken and the silicon forms new bonds with the oxygen atoms of the oxide layer. The carbon chain remains attached to the silicon atom and forms the surface of barrier layer 315. The inventors expect that many different silanes can be used to form barrier layer 315 including, but not limited to, trichlorosilanes, trimethoxysilanes, and triethoxysilanes. Preferably, but not necessarily, the carbon chain is at least four carbons long. The inventors have obtained good results using eight carbon alkyl chains.

The properties of the surface of barrier layer 315 can be customized by attaching different chemical moieties to the carbon chain including, but not limited to, —NH₂, —OH, and —COOH. For example attaching an —NH₂ group to the end of the carbon chain opposite the silicon facilitates the formation of a bond between the liquid crystal material of layer 316 and the surface of barrier layer 315. As another example, the —NH₂ group facilitates the formation of a bond with the epoxy used to form a retaining gasket around liquid crystal layer 316, thereby preventing the seepage of moisture into liquid crystal layer 316 during the life of the device.

To summarize, barrier layer 315 includes some or all of the following properties. First, barrier layer 315 can protect liquid crystal alignment layer 314 from contamination including moisture, thus extending the life of the device even under environmental stresses such as heat and humidity. Additionally, the surface of barrier layer 315 can be customized through the use of chemical moieties to control aspect of the liquid crystal—surface interaction. Further, barrier layer 315 can provide better adhesion to the liquid crystal cell gasket material. What's more, barrier layer 315 provides these advantages while communicating the anisotropic properties of liquid crystal alignment layer 314 to liquid crystal layer 316.

FIG. 3B is a cross-sectional view of a transparent electrode 330, including a glass substrate 322, an antireflective coating 324, a transparent conductive layer 320, a liquid crystal alignment layer 318, and a barrier layer 325. Conductive layer 320 and antireflective layer 324 are formed on opposite sides of glass substrate 322. Liquid crystal alignment layer 318 is formed over conductive layer 320, and barrier layer 325 is formed directly on liquid crystal alignment layer 318.

The composition of liquid crystal alignment layer 318 and barrier layer 325 are substantially the same as liquid crystal alignment layer 314 and barrier layer 315, respectively. Note however, that the anisotropic properties (e.g., the alignment direction) of alignment layer 314 can be different than the anisotropic properties of alignment layer 318, depending on the design of the particular LCD. Similarly, the properties of barrier layer 315 (e.g., the presence of surface customizing moieties) can be different that the properties of barrier layer 325.

FIG. 3C is a cross-sectional view of an assembled LCD device 340 formed by applying liquid crystal layer 316 over barrier layer 315 of reflective backplane substrate 300, and then mounting transparent electrode 330 over liquid crystal layer 116 such that barrier layer 325 is closest to liquid crystal layer 116. Thus, liquid crystal layer 316 is disposed between and in direct contact with two facing barrier layers 315 and 325.

Liquid crystal layer 316 is sealed between reflective display backplane 300 and transparent electrode 330 by a gasket (not shown), which also fixes reflective display backplane 300 to transparent electrode 330. The gasket is formed with an epoxy on barrier layer 315 around the perimeter of the array of pixel mirrors 308 so as to form a reservoir for the liquid crystal material. After the volume defined by the gasket is filled with the liquid crystal material, transparent electrode 330 is placed over the liquid crystal material with barrier layer 325 in contact with the gasket. As the epoxy cures, the gasket bonds to barrier layers 315 and 325, sealing the liquid crystal material there between.

FIG. 4 is a flow chart summarizing one method 400 of manufacturing a liquid crystal display device according to the present invention. In a first step 402, a substrate (e.g., a reflective display backplane, a transparent electrode, etc.) is provided. Then, in a second step 404, a liquid crystal alignment layer is formed over the substrate. Next, in an optional third step 406, the liquid crystal alignment layer is plasma cleaned. It should be understood that plasma cleaning reduces the impurities present on the surface of the alignment layer, but is not a necessary step in the formation of a barrier layer. Next, in a fourth step 408, a barrier layer is formed over the liquid crystal alignment layer. Then, in a fifth step 410, liquid crystal material is applied over barrier layer. When step 410 is complete, the substrate (e.g., a reflective display backplane) is ready for assembly with another substrate (e.g., a transparent electrode) having an alignment layer and a barrier layer prepared by the same or similar method, to create an LCD device.

FIG. 5 is a flow chart summarizing one method 500 of performing fourth step 408 (form barrier layer over liquid crystal alignment layer) of method 400 of FIG. 4. In a first step 502, a substrate with a liquid crystal alignment layer is placed in a pressure controlled oven. Next, in a second step 504, the oven is heated and purged. The purge step includes, for example, repeatedly pumping the oven down to a pressure of approximately 1 torr and back filling with dry nitrogen. Next, in a third step 506, a barrier layer reagent (e.g., a silane or silizane) is introduced into the oven and the liquid crystal alignment layer is exposed to the reagent for a predetermined period of time. Next, in a fourth step 508, the oven is purged and cooled. Finally, in a fifth step 510, the substrate with the barrier layer formed over the liquid crystal alignment layer is removed from the pressure controlled oven.

FIG. 6 is a flow chart summarizing one method 600 of assembling an LCD device according to the present invention. In a first step, two substrates (e.g., a reflective display backplane and a transparent electrode) are provided, each having a liquid crystal alignment layer and a barrier layer. Next, in a second step 604, the two substrates are fixed in position with respect to one another to form a cell, with their barrier layers facing one another. Finally, in a third step 606, liquid crystal material is injected into the cell between the barrier layers of the substrates.

The description of particular embodiments and methods of the present invention is now complete. Many of the described features may be substituted, altered or omitted without departing from the scope of the invention. For example, the present invention can be used with alternate backplane configurations and types (e.g., manufactures may vary layering, composition, and materials as needed). As another example, plasma cleaning may be omitted as it is not a necessary step, although it is beneficial to LCD device life and quality. As yet another example, the reagents used in forming a barrier layer over an alignment layer can be changed to suit a particular alignment layer composition, or to obtain a desired characteristic of the barrier layer. Additionally, it should be apparent that these methods and practices can be adapted for use on other types of LCD devices, in addition to the reflective liquid crystal on silicon (LCOS) light valve type illustrated. These and other deviations from the particular embodiments and methods shown will be apparent to those skilled in the art, particularly in view of the foregoing disclosure. 

1. A liquid crystal display device including: a substrate; a liquid crystal layer; a liquid crystal alignment layer between said substrate and said liquid crystal layer, and a barrier layer between said liquid crystal alignment layer and said liquid crystal layer.
 2. A liquid crystal display device according to claim 1, wherein said substrate is a reflective display backplane.
 3. A liquid crystal display device according to claim 2, wherein said reflective display backplane includes: a silicon substrate; at least one integrated circuitry layer; and a plurality of pixel mirrors.
 4. A liquid crystal display device according to claim 1, wherein said substrate is a transparent substrate.
 5. A liquid crystal display device according to claim 4, further comprising a transparent electrode layer formed on said transparent substrate.
 6. A liquid crystal display device according to claim 1, wherein said barrier layer is formed directly on said liquid crystal alignment layer.
 7. A liquid crystal display device according to claim 6, wherein said liquid crystal layer is in direct contact with said barrier layer.
 8. A liquid crystal display device according to claim 1, wherein said device is a vertically aligned, nematic liquid crystal display device.
 9. A liquid crystal display device according to claim 1, wherein said liquid crystal alignment layer is a thin film layer.
 10. A liquid crystal display device according to claim 1, wherein said liquid crystal alignment layer includes an oxide layer.
 11. A liquid crystal display device according to claim 10, wherein said oxide layer includes at least one of SiO or SiO₂.
 12. A liquid crystal display device according to claim 1, wherein said barrier layer is more resistant to at least one of the absorption or adsorption of impurities than said liquid crystal alignment layer.
 13. A liquid crystal display device according to claim 1, wherein said barrier layer communicates anisotropic properties of said liquid crystal alignment layer to said liquid crystal layer.
 14. A liquid crystal display device according to claim 1, wherein said barrier layer is a monolayer.
 15. A liquid crystal display device according to claim 1, wherein said barrier layer is formed with one of a silane or a silizane.
 16. An LCD device according to claim 15, wherein said barrier layer is formed with one of Octyl-Triethoxy-Silane (OTS) or Hexamethyldisilizane (HMDS).
 17. A liquid crystal display device according to claim 15, wherein said barrier layer is formed with a silane.
 18. A liquid crystal display according to claim 1, further comprising: a second substrate disposed on an opposite side of said liquid crystal layer as said first substrate; a second liquid crystal alignment layer between said second substrate and said liquid crystal layer; and a second barrier layer between said second liquid crystal alignment layer and said liquid crystal layer.
 19. A liquid crystal display according to claim 18, wherein: said substrate is a reflective display backplane; and said second substrate is a transparent substrate.
 20. A liquid crystal display device according to claim 18, further comprising a gasket disposed around the perimeter of said liquid crystal layer and abutting at least one of said barrier layer and said second barrier layer.
 21. A method of manufacturing a liquid crystal display device comprising the steps of: providing a substrate; forming a liquid crystal alignment layer over said substrate; forming a barrier layer over said liquid crystal alignment layer; and forming a liquid crystal layer over said barrier layer.
 22. A method of manufacturing a liquid crystal display device according to claim 21, wherein said substrate is reflective display backplane.
 23. A method of manufacturing a liquid crystal display device according to claim 21, wherein said substrate is a transparent substrate.
 24. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said barrier layer over said liquid crystal alignment layer includes forming said barrier layer directly on said liquid crystal alignment layer.
 25. A method of manufacturing a liquid crystal display device according to claim 24, wherein said step of forming said liquid crystal layer over said barrier layer includes applying said liquid crystal layer in direct contact with said barrier layer.
 26. A method of manufacturing a liquid crystal display device according to claim 21, wherein: said step of forming said liquid crystal layer includes forming a nematic liquid crystal layer; and said step of forming said liquid crystal alignment layer includes forming an alignment layer suitable for use in a vertically aligned liquid crystal display device.
 27. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said liquid crystal alignment layer includes forming a thin film alignment layer.
 28. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said liquid crystal alignment layer includes forming an oxide layer.
 29. A method of manufacturing a liquid crystal display device according to claim 28, wherein said oxide layer includes at least one of SiO or SiO₂.
 30. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said barrier layer includes forming a layer that is more resistant to at least one of the absorption or adsorption of impurities than said liquid crystal alignment layer.
 31. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said barrier layer includes forming a layer that communicates anisotropic properties of said liquid crystal alignment layer to said liquid crystal layer.
 32. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said barrier layer includes forming a monolayer on said liquid crystal alignment layer.
 33. A method of manufacturing a liquid crystal display device according to claim 21, wherein said step of forming said barrier layer includes using at least one of either a silane or a silizane to form said barrier layer.
 34. A method of manufacturing a liquid crystal display device according to claim 33, wherein said step of forming said barrier layer includes using at least one of either Octyl-Triethoxy-Silane or Hexamethyldisilizane.
 35. A method of manufacturing a liquid crystal display device according to claim 33, wherein said step of forming said barrier layer includes using a silane to form said barrier layer.
 36. A method of manufacturing a liquid crystal display device according to claim 21, further comprising: providing a second substrate; forming a second liquid crystal alignment layer over said second substrate; forming a second barrier layer over said liquid crystal alignment layer; and mounting said second substrate with said second barrier layer facing said barrier layer with said liquid crystal layer disposed there between.
 37. A method of manufacturing a liquid crystal display device according to claim 36, wherein said substrate is a reflective display backplane and said second substrate is a transparent substrate.
 38. A method of manufacturing a liquid crystal display device according to claim 36, further comprising positioning a liquid crystal retaining gasket between said substrate and said second substrate such that one portion of said gasket abuts said barrier layer and another portion of said gasket abuts said second barrier layer.
 39. A method of manufacturing a liquid crystal display device according to claim 21, further comprising performing a plasma cleaning process on said alignment layer prior to forming said barrier layer.
 40. A liquid crystal display device including: a substrate; a liquid crystal layer; a liquid crystal alignment layer between said substrate and said liquid crystal layer; and means for protecting said liquid crystal alignment layer from at least one of the absorption and adsorption of contaminants. 